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| LEADER |
00000cam a2200000 i 4500 |
| 001 |
in00000057433 |
| 005 |
20230327161451.2 |
| 008 |
800306s1979 waua b 101 0 eng |
| 010 |
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|a 80105579
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| 020 |
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|a 089252202X
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|a (OCoLC)06144988
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|9 AAF7394AM
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|a DLC
|c DLC
|d TXA
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| 049 |
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|a TK7871.85
|b .D495
|
| 082 |
0 |
|
|a 621.381/74
|
| 245 |
0 |
0 |
|a Developments in semiconductor microlithography IV :
|b April 23-24, 1979, San Jose, California /
|c Jim Dey, editor ; cooperating organization, Northern California Microphotomask/Masking Working Group.
|
| 264 |
|
1 |
|a Bellingham, Wash. :
|b Society of Photo-optical Instrumentation Engineers,
|c [1979]
|
| 264 |
|
4 |
|c ©1979
|
| 300 |
|
|
|a vi, 194 pages :
|b illustrations ;
|c 28 cm.
|
| 336 |
|
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|a text
|b txt
|2 rdacontent
|
| 337 |
|
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|a unmediated
|b n
|2 rdamedia
|
| 338 |
|
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|a volume
|b nc
|2 rdacarrier
|
| 490 |
1 |
|
|a Proceedings of the Society of Photo-optical Instrumentation Engineers ; v. 174
|
| 500 |
|
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|a Proceedings of a seminar.
|
| 504 |
|
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|a Includes bibliographical references and indexes.
|
| 650 |
|
0 |
|a Semiconductors
|v Congresses.
|
| 650 |
|
0 |
|a Photolithography
|x Congresses.
|
| 650 |
|
0 |
|a Thin-film circuits
|x Congresses.
|
| 650 |
|
0 |
|a Microelectronics
|v Congresses.
|
| 700 |
1 |
|
|a Dey, Jim.
|
| 710 |
2 |
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|a Northern California Microphotomask/Masking Working Group.
|
| 830 |
|
0 |
|a Proceedings of SPIE--the International Society for Optical Engineering ;
|v v. 174.
|
| 856 |
4 |
1 |
|u https://www.spiedigitallibrary.org/conference-proceedings-of-SPIE/0174.toc
|t 0
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| 999 |
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|a MARS
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| 952 |
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|p ric
|a Texas A&M University
|b Rellis Campus
|c Joint Library Facility
|d Remote Storage
|t 0
|e TK7871.85 .D495
|h Library of Congress classification
|i unmediated -- volume
|m A14805501634
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| 998 |
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