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Journal of vacuum science and technology. materials, processing, measurement, & phenomena : JVST B. B, Nanotechnology & microelectronics :

Bibliographic Details
Previous Title:Journal of vacuum science & technology. B, Microelectronics and nanometer structures
Corporate Authors: American Vacuum Society, American Institute of Physics
Format: Journal
Language:English
Published: New York, NY : AVS through the American Institute of Physics, [2010-]
Subjects:
Nanotechnology > Periodicals.
Microelectronics > Periodicals.
Nanoelectronics > Periodicals.
Nanoelectronics.
Microelectronics.
Nanotechnology.
Periodicals.
Online Availability: Check for online availability
Description
Published:Began with 2nd ser., v. 28, no. 2 (Mar./Apr. 2010).
Publication Frequency:Bimonthly
ISSN:2166-2746
2166-2754
1071-1023
Related Items:Includes: Papers from the ... International Vacuum Nanoelectronics Conference, 2010- ; papers from the ... North American Conference on Molecular-Beam Epitaxy, 2010-