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Bibliographic Details
Corporate Authors: IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop, Institute of Electrical and Electronics Engineers, Semiconductor Equipment and Materials International, IEEE Electron Devices Society, IEEE Components, Hybrids, and Manufacturing Technology Society
Format: Conference Proceeding Journal
Language:English
Published: New York, NY : IEEE, ©1990-
Subjects:
Semiconductors > Design and construction > Congresses.
Semiconductor industry > Congresses.
Semiconductor industry.
Semiconductors > Design and construction.
Semi-conducteurs > Industrie > Congrès.
Electronic journals.
Periodicals.
Conference papers and proceedings.
Online Availability: Check for online availability
Description
Published:Print began with 1st ('90).
Item Description:Some issues have also a distinctive theme title.
Imprint varies.
Physical Description:Also issued in print.
Publication Frequency:Annual
Format:Mode of access: World Wide Web.
ISSN:2376-6697
1078-8743