APA (7th ed.) Citation

IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop, Institute of Electrical and Electronics Engineers, Semiconductor Equipment and Materials International, IEEE Electron Devices Society, & IEEE Components, Hybrids, and Manufacturing Technology Society. (1990). ASMC ... proceedings. IEEE.

Chicago Style (17th ed.) Citation

IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop, Institute of Electrical and Electronics Engineers, Semiconductor Equipment and Materials International, IEEE Electron Devices Society, and Hybrids IEEE Components. ASMC ... Proceedings. New York, NY: IEEE, 1990.

MLA (9th ed.) Citation

IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop, et al. ASMC ... Proceedings. IEEE, 1990.