Optical scattering : measurement and analysis /
The early editions of Optical Scattering were dominated by the exploration of the relationship between roughness and scatter from optically smooth surfaces by developing the relationship between the surface statistics and measured surface scatter in BRDF units. The upper limit roughness for using sc...
| Main Author: | |
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| Format: | Book |
| Language: | English |
| Published: |
Bellingham, Washington :
SPIE,
[2025].
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| Edition: | Fourth edition. |
| Series: | SPIE Press monograph ;
PM392. |
| Subjects: |
| Summary: | The early editions of Optical Scattering were dominated by the exploration of the relationship between roughness and scatter from optically smooth surfaces by developing the relationship between the surface statistics and measured surface scatter in BRDF units. The upper limit roughness for using scatter measurement to calculate surface roughness was well established. The basic concept of reciprocity, as it applies to scatter, should have been in the earlier editions and that mistake is corrected in this edition. The third edition added the use of scatter in the semiconductor industry, which included mapping, sizing and identifying wafer pits and particles using their measured scatter. These concepts and the related calculations are of course repeated in this edition, but new in these pages are useful ways to move product inspection beyond the uncoated smooth surface limit. It may be impossible to calculate surface roughness, but it is straight forward for manufacturers to define "good" and "bad" versions of their products and then use related BRDF signals to very quickly tell the difference during manufacturing. After all, beauty is in the eye of the beholder and what we see is scattered light. Very simple scatter measurements can indicate these product differences as fast as they are produced. The differences can just be changes in BRDF, or a defined new parameter, "Fractional Scatter" can be tracked. Compared to expensive semiconductor measurements, inspection of everyday products (kitchen appliances, car paint, furniture appearance, etc.) for appearance represents a huge market that can be economically addressed with simple, fast scatter systems. In addition to repeating the basic scatter concepts and definitions, the fourth edition presents this as a huge underdeveloped application for scatterometry. |
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| Physical Description: | xxiv, 338 pages : illustrations ; 26 cm. |
| Bibliography: | Includes bibliographical references (pages 315-334) and index. |
| ISBN: | 9781510690288 151069028X |