rdf-syntax-grammar
mods:
  schema location: http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
  title info:
    title: NANOSTRUCTURED THIN FILM DEPOSITION BY SPUTTERING
    sub title: from fundamentals to
  name:
    name part: ScienceDirect (Online service)
  type of resource: text
  genre: Electronic books.
  origin info:
    place:
      place term: xx
    place:
      place term: S.l.]
    publisher: WOODHEAD PUBLISHING
    date issued: 2025
    issuance: monographic
  language:
    language term: eng
  physical description:
    form: remote
    extent: 1 online resource
  subject:
    topic: Nanostructured materials
  subject:
    topic: Thin films
  subject:
    topic: Sputtering (Physics)
  subject:
    topic: Nanomatériaux
  subject:
    topic: Couches minces
  subject:
    topic: Pulvérisation cathodique
  classification: TA418.9.N35
  classification: 620.115
  related item:
    title info:
      title: Woodhead Publishing reviews: Mechanical engineering series
  related item:
    identifier: (OCoLC)1457623436
  identifier: 9780443298936
  identifier: 0443298939
  identifier: 9780443298929
  identifier: 0443298920
  identifier: http://proxy.library.tamu.edu/login
  record info:
    record content source: YDX
    record creation date: 250620
    record change date: 20260327190623.7
    record identifier: in00005775031
    language of cataloging:
      language term: eng