NANOSTRUCTURED THIN FILM DEPOSITION BY SPUTTERING from fundamentals to.

Bibliographic Details

Corporate Author:	ScienceDirect (Online service)
Format:	eBook
Language:	English
Published:	[S.l.] : WOODHEAD PUBLISHING, 2025.
Series:	Woodhead Publishing reviews: Mechanical engineering series
Subjects:	Nanostructured materials. Thin films. Sputtering (Physics) Nanomatériaux. Couches minces. Pulvérisation cathodique. Electronic books.
Online Access:	Connect to the full text of this electronic book