rdf-syntax-grammar
mods:
  schema location: http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
  title info:
    title: Fundamentals of Vacuum Science and System Design for High and Ultrahigh Vacuum
    part number: Volume 1
    part name: Vacuum and thin-film deposition technologies
  title info:
    title: Vacuum and thin-film deposition technologies
  name:
    name part: ScienceDirect (Online service)
  type of resource: text
  genre: Electronic books.
  origin info:
    place:
      place term: xx
    date issued: 2024
    issuance: monographic
  language:
    language term: eng
  physical description:
    form: remote
    extent: 1 online resource
  subject:
    topic: Vapor-plating
  subject:
    topic: Vacuum technology
  subject:
    topic: Vide (Technologie)
  classification: TS695
  classification: 671.7/35
  identifier: 9780128233924
  identifier: 0128233923
  identifier: http://proxy.library.tamu.edu/login
  record info:
    record content source: OCLKB
    record creation date: 241124
    record change date: 20260327180726.0
    record identifier: in00005774049
    language of cataloging:
      language term: eng