Handbook of thin film deposition : theory, technology and semiconductor applications /
| Corporate Author: | ScienceDirect (Online service) |
|---|---|
| Other Authors: | Schepis, Dominic (Editor), Seshan, Krishna (Editor) |
| Format: | eBook |
| Language: | English |
| Published: |
Amsterdam :
Elsevier,
[2025]
|
| Edition: | Fifth edition. |
| Subjects: | |
| Online Access: | Connect to the full text of this electronic book |
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