Handbook of thin film deposition : theory, technology and semiconductor applications /
| Corporate Author: | |
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| Other Authors: | , |
| Format: | eBook |
| Language: | English |
| Published: |
Amsterdam :
Elsevier,
[2025]
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| Edition: | Fifth edition. |
| Subjects: | |
| Online Access: | Connect to the full text of this electronic book |
| Item Description: | Includes index. |
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| Physical Description: | 1 online resource (xix, 517 pages) : illustrations |
| ISBN: | 9780443135248 044313524X 9780443135231 0443135231 |