ScienceDirect (Online service), Schepis, D., & Seshan, K. (2025). Handbook of thin film deposition: Theory, technology and semiconductor applications (Fifth edition.). Elsevier.
Chicago Style (17th ed.) CitationScienceDirect (Online service), Dominic Schepis, and Krishna Seshan. Handbook of Thin Film Deposition: Theory, Technology and Semiconductor Applications. Fifth edition. Amsterdam: Elsevier, 2025.
MLA (9th ed.) CitationScienceDirect (Online service), et al. Handbook of Thin Film Deposition: Theory, Technology and Semiconductor Applications. Fifth edition. Elsevier, 2025.
Warning: These citations may not always be 100% accurate.