Lithography for VLSI /
| Uniform Title: | Lithography for VLSI (Online) |
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| Corporate Author: | |
| Other Authors: | , |
| Format: | eBook |
| Language: | English |
| Published: |
Orlando :
Academic Press,
1987.
|
| Series: | VLSI electronics ;
v. 16. |
| Subjects: | |
| Online Access: | Connect to the full text of this electronic book |
| Physical Description: | 1 online resource (xi, 361 pages :) illustrations. |
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| Format: | Master and use copy. Digital master created according to Benchmark for Faithful Digital Reproductions of Monographs and Serials, Version 1. Digital Library Federation, December 2002. |
| Bibliography: | Includes bibliographies and index. |
| ISBN: | 0122341163 9780122341168 9781483217826 1483217825 |