Micro electro-fabrication /

Bibliographic Details

Corporate Author:	ScienceDirect (Online service)
Other Authors:	Saleh, Tanveer (Editor), Ali, Mohamed Sultan Mohamed (Editor), Takahata, Kenichi (Editor)
Format:	eBook
Language:	English
Published:	Amsterdam ; Cambridge, MA : Elsevier, [2021]
Series:	Micro & nano technologies.
Subjects:	Nanoelectronics. Microfabrication. Nanoélectronique. Microfabrication Nanoelectronics Electronic books.
Online Access:	Connect to the full text of this electronic book