Surface metrology for micro- and nanofabrication /

Bibliographic Details
Main Author: Gao, Wei, Ph. D.
Corporate Author: ScienceDirect (Online service)
Format: eBook
Language:English
Published: Amsterdam : Elsevier, [2021]
Series:Micro & nano technologies.
Subjects:
Online Access:Connect to the full text of this electronic book
Description
Item Description:12 Self-calibration of probe tip radius and cutting edge sharpness.
Physical Description:1 online resource (452 pages)
Bibliography:References-9 On-machine atomic force microscope-9.1 Introduction-9.2 On-machine spiral scan atomic force microscope-9.3 On-machine automatic alignment atomic force microscope-9.4 Summary-References-10 On-machine roll profiler-10.1 Introduction-10.2 On-machine two-probe profiler-10.3 On-machine four-probe profiler-10.4 Summary-References-11 In-process fast tool servo profiler-11.1 Introduction-11.2 Force sensor-integrated fast tool servo-11.3 In-process surface profile measurement-11.4 In-process tool setting-11.5 Summary-References.
ISBN:9780128178515
0128178515