Smart sensors and MEMS : intelligent devices and microsystems for industrial applications /

Smart Sensors and MEMS: Intelligent Devices and Microsystems for Industrial Applications, Second Edition highlights new, important developments in the field, including the latest on magnetic sensors, temperature sensors and microreaction chambers. The book outlines the industrial applications for sm...

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Bibliographic Details
Corporate Author:	ScienceDirect (Online service)
Other Authors:	Nihtianov, Stoyan (Editor), Luque, A. (Antonio) (Editor)
Format:	eBook
Language:	English
Published:	Duxford : Woodhead Publishing, [2018]
Edition:	Second edition.
Series:	Woodhead Publishing series in electronic and optical materials
Subjects:	Detectors > Industrial applications. Microelectromechanical systems > Industrial applications. Microsystèmes électromécaniques > Applications industrielles. TECHNOLOGY & ENGINEERING > Technical & Manufacturing Industries & Trades. Detectors > Industrial applications Electronic books.
Online Access:	Connect to the full text of this electronic book

Description
Summary:	Smart Sensors and MEMS: Intelligent Devices and Microsystems for Industrial Applications, Second Edition highlights new, important developments in the field, including the latest on magnetic sensors, temperature sensors and microreaction chambers. The book outlines the industrial applications for smart sensors, covering direct interface circuits for sensors, capacitive sensors for displacement measurement in the sub-nanometer range, integrated inductive displacement sensors for harsh industrial environments, advanced silicon radiation detectors in the vacuum ultraviolet (VUV) and extreme ultraviolet (EUV) spectral range, among other topics. New sections include discussions on magnetic and temperature sensors and the industrial applications of smart micro-electro-mechanical systems (MEMS). The book is an invaluable reference for academics, materials scientists and electrical engineers working in the microelectronics, sensors and micromechanics industry. In addition, engineers looking for industrial sensing, monitoring and automation solutions will find this a comprehensive source of information.
Physical Description:	1 online resource
Bibliography:	Includes bibliographical references and index.
ISBN:	9780081020562 0081020562 9780081020555 0081020554