Plasma etching processes for CMOS device realization /
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| Format: | eBook |
| Language: | English |
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London, UK : Kidlington, Oxford, UK :
ISTE Press ; Elsevier,
2017.
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| Online Access: | Connect to the full text of this electronic book |
| Physical Description: | 1 online resource (x, 121 pages) : illustrations |
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| Bibliography: | Includes bibliographical references and index. |
| ISBN: | 9780081011966 0081011962 |