APA (7th ed.) Citation

ScienceDirect (Online service) & Babu, S. V. (2016). Advances in chemical mechanical planarization (CMP). Woodhead Publishing.

Chicago Style (17th ed.) Citation

ScienceDirect (Online service) and S. V. Babu. Advances in Chemical Mechanical Planarization (CMP). Waltham, MA: Woodhead Publishing, 2016.

MLA (9th ed.) Citation

ScienceDirect (Online service) and S. V. Babu. Advances in Chemical Mechanical Planarization (CMP). Woodhead Publishing, 2016.

Warning: These citations may not always be 100% accurate.