Materials and process characterization /

Materials and Process Characterization.

Bibliographic Details

Corporate Author:	ScienceDirect (Online service)
Other Authors:	Einspruch, Norman G. (Editor), Larrabee, Graydon B., 1932- (Editor)
Format:	eBook
Language:	English
Published:	New York : Academic Press, 1983.
Series:	VLSI electronics ; volume 6.
Subjects:	Integrated circuits > Very large scale integration. Microelectronics > Materials. Production engineering. Circuits intégrés à très grande échelle. Microélectronique > Matériaux. Technique de la production. TECHNOLOGY & ENGINEERING > Mechanical. Integrated circuits > Very large scale integration Microelectronics > Materials Production engineering Electronic books.
Online Access:	Connect to the full text of this electronic book