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International progress in precision engineering
proceedings of the 7th International Precision Engineering Seminar, Kobe, Japan, May 1993
International Precision Engineering Seminar 1993 : Kobe-shi, Japan)
1 online resource (1091 pages) : illustrations
International Progress in Precision Engineering documents the proceedings of the 7th International Precision Engineering Seminar held in Kobe, Japan, May 1993. The seminar brought together the world's leading precision engineering practitioners from areas of application as diverse as sensors, actuators, scanning tip microscopy, micro and nano machining (including bio-machining), ultra precision measuring machines, machine tools, and large optics for space technology. The seminar included 10 oral sessions that dealt with the following topics: (I) Metrology - The Science Base For Precision Engin.
Front Cover; International Progress in Precision Engineering; Copyright Page; Table of Contents; Foreword; Chapter 1. Precision Engineering and its Impact on the Electronics Industry: Past, Present, and Future; Essential Elements of Home Electronics Products; The Computer; Progress of LSI Technology & Devices; Predictions for IC Technology In the 90s; The VCR/Camera-Recorder; Japan's Contributions to the Precision Engineering Field; Product Evolution and Bearing Speed/Precision; Challenges for Micro-Fine Production Engineering
Chapter 2. Limitations of interpolation accuracy in heterodyneinterferometryAbstract; 1. Introduction; 2. Interference phase measurement; Conclusions; References; Chapter 3. A New Ultra Precision Instrument for Calibration ofGauges and Measurements of High-Quality Products; 1. Introduction; 2. Basic Investigations; 3. Final Design; 4. Results; Chapter 4.Correctness of assessment software in coordinate metrology; 1.Introduction; 2.Current scene; 3.The way forward; 4.Conclusions; References; Chapter 5. Concept for the Traceability of Measurementswith Coordinate Measuring Machines
1.Traceability of a Coordinate Measuring Machine2.State of the art; 3.Virtual CMM method; 5. Maintaining the validity of a calibration; 6.The use of calibrated CMMs; 7.Conclusions and future developments; Bibliography; Chapter 6. A Six-Degrees of FreedomFine Motion Mechanism; Abstract; 1. Introduction; 2. Experimental mechanism; 3. Multi-dof motions; 4. Reduction of influence of an inertia load; 5. Conclusions; 6. Reference; Chapter 7. Three Dimensional Position Sensor Using Optical Collimator for NanometerResolution; 1.Introduction; 2. Theory of reflection by sphere
3.Detection of in-plane displacements4.Conclusions; References; Chapter 8. Laser Photo-etching Method for Maskless Fabrication of a Through-Hole Contact (THC) Amorphous Silicon (a-Si) Solar CellSubmodule; Abstract; 1.Introduction; 2. THC Integrated-type a-Si SolarCell; 3.Laser Photo-etching Method; 4.Output Performance; 5.Conclusion; Acknowledgement; References; Chapter 9. Plasma CVM (Chemical Vaporization Machining) -- A Chemical Machining Method With Equal Performances toConventional Mechanical Methods from the Sense of Removal Rates and Spatial Resolutions; Abstract; 1. Introduction
2. Basic concepts of PlasmaCVM3· Cutting application; 4. Polishing application; 5. Summery; Chapter 10.BROAD ION BEAM PROCESSING OF LARGE SURFACE AREAS WITH NANOMETER PRECISION; ABSTRACT; INTRODUCTION; PROCESSING; RESULTS; CONCLUSIONS; ACKNOWLEDGEMENTS; REFERENCES; Chapter 11. Principle of Ion Beam Processing and its Applicationto Fine and Precision Fabrication; 1. Introduction; 2 . Concept and mechanism of ion beam machining; 3 . Ion beam machining characteristics; 4. Problems of ion beam machining; 5. Equipment; 6. Application of ionbeam machining; References
Includes bibliographical references at the end of each chapters and index.
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International progress in precision engineering : proceedings of the 7th International Precision Engineering Seminar, Kobe, Japan, May 1993
International Precision Engineering Seminar (7th : 1993 : Kobe-shi, Japan).
Stoneham, Massachusetts : Butterworth-Heinemann, ©1993