Plasma processing for VLSI /

Plasma Processing for VLSI.

Bibliographic Details

Corporate Author:	ScienceDirect (Online service)
Other Authors:	Einspruch, Norman G., Brown, Dale M.
Format:	eBook
Language:	English
Published:	New York : Academic Press, 1984.
Series:	VLSI electronics ; v. 8.
Subjects:	Integrated circuits > Very large scale integration. Plasma (Ionized gases) > Industrial applications. Circuits intégrés à très grande échelle. Plasma (Gaz ionisés) > Applications industrielles. TECHNOLOGY & ENGINEERING > Mechanical. Integrated circuits > Very large scale integration Plasma (Ionized gases) > Industrial applications Gravure par plasma. Lithographie par rayons X. Pulvérisation cathodique. Electronic books.
Online Access:	Connect to the full text of this electronic book