APA (7th ed.) Citation

ScienceDirect (Online service), Einspruch, N. G., & Brown, D. M. (1984). Plasma processing for VLSI. Academic Press.

Chicago Style (17th ed.) Citation

ScienceDirect (Online service), Norman G. Einspruch, and Dale M. Brown. Plasma Processing for VLSI. New York: Academic Press, 1984.

MLA (9th ed.) Citation

ScienceDirect (Online service), et al. Plasma Processing for VLSI. Academic Press, 1984.