rdf-syntax-grammar
mods:
  schema location: http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
  title info:
    title: Plasma sources for thin film deposition and etching
  name:
    name part: Francombe, Maurice H.
    role:
      role term: editor.
  name:
    name part: Vossen, John L.
    role:
      role term: editor.
  name:
    name part: ScienceDirect (Online service)
  type of resource: text
  genre: bibliography
  genre: conference publication
  genre: Electronic books.
  genre: Congress
  genre: proceedings (reports)
  genre: Conference papers and proceedings
  genre: Conference papers and proceedings.
  genre: Actes de congrès.
  origin info:
    place:
      place term: cau
    date issued: 1994
    issuance: monographic
  language:
    language term: eng
  physical description:
    form: remote
    extent: 1 online resource (xiii, 397 pages) : illustrations
  note: edited by Maurice H. Francombe, John L. Vossen.
  note: Includes bibliographical references and indexes.
  note: English.
  subject:
    topic: Thin films
  subject:
    topic: Couches minces
  subject:
    topic: Thin films
  subject:
    topic: Dünne Schicht
  subject:
    topic: Herstellung
  subject:
    topic: Plasmaanlage
  subject:
    topic: Ätzen
  subject:
    topic: Couches minces
  subject:
    topic: Projection au plasma
  subject:
    topic: Technique des plasmas
  classification: QC176.83
  classification: 530.4/175
  classification: 33.80
  classification: UP 7550
  classification: UP 1100
  related item:
    title info:
      title: Plasma sources for thin film deposition and etching
    identifier: (DLC) 63016561
    identifier: (OCoLC)31414635
  related item:
    title info:
      title: Physics of thin films ; volume 18
  identifier: 9780080925134
  identifier: 0080925138
  identifier: 9780125330183
  identifier: 0125330189
  identifier: 842541 MIL
  identifier: http://proxy.library.tamu.edu/login
  record info:
    record content source: OPELS
    record creation date: 141010
    record change date: 20260326210922.1
    record identifier: in00005756653
    language of cataloging:
      language term: eng