Plasma sources for thin film deposition and etching /
| Corporate Author: | |
|---|---|
| Other Authors: | , |
| Format: | eBook |
| Language: | English |
| Language Notes: | English. |
| Published: |
San Diego, CA. :
Academic Press,
1994.
|
| Series: | Physics of thin films ;
volume 18. |
| Subjects: | |
| Online Access: | Connect to the full text of this electronic book |
| Physical Description: | 1 online resource (xiii, 397 pages) : illustrations |
|---|---|
| Bibliography: | Includes bibliographical references and indexes. |
| ISBN: | 9780080925134 0080925138 |