rdf-syntax-grammar
mods:
  schema location: http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
  title info:
    title: Fundamental principles of engineering nanometrology
  name:
    name part: Leach, R. K.
    role:
      role term: creator
  name:
    name part: ScienceDirect (Online service)
  type of resource: text
  genre: bibliography
  genre: Electronic books.
  origin info:
    place:
      place term: enk
    date issued: 2010
    edition: First edition.
    issuance: monographic
  language:
    language term: eng
  physical description:
    form: remote
    extent: 1 online resource (xxvi, 321 pages) : illustrations
  abstract: Working at the nano-scale demands an understanding of the high-precision measurement techniques that make nanotechnology and advanced manufacturing possible. This new edition of Fundamental Principles of Engineering Nanometrology provides a road map and toolkit for metrologists engaging with the rigor of measurement and data analysis at the nano-scale, from the fundamentals of precision measurement, to different measurement and characterization techniques. This book is an essential guide for the emerging nanomanufacturing and nanofabrication sectors, where measurement and standardization requirements are paramount both in product specification and quality assurance. Updated to cover new and emerging technologies, and recent developments in standards and regulatory frameworks, this second edition includes many new sections covering, for example, new technologies in scanning probe and e-beam microscopy (including DLS, NTA), recent developments in interferometry, and advances in co-ordinate metrology.
  note: by Richard K. Leach.
  note: Includes bibliographical references and index.
  subject:
    topic: Nanotechnology
  subject:
    topic: Microtechnology
  subject:
    topic: Metrology
  subject:
    topic: Microtechnologie
  subject:
    topic: Métrologie
  subject:
    topic: Nanotechnologie
  subject:
    topic: Nanotechnologies
  subject:
    topic: Métrologie
  subject:
    topic: Metrology
  subject:
    topic: Microtechnology
  subject:
    topic: Nanotechnology
  subject:
    topic: Metrologie
  subject:
    topic: Nanostruktur
  subject:
    topic: Nanotechnologie
  classification: T174.7 .L43 2010eb
  classification: 620.50287
  classification: ZQ 3100
  related item:
    title info:
      title: Fundamental principles of engineering nanometrology
    name:
      name part: Leach, R.K.
    origin info:
      edition: First edition
    identifier: (OCoLC)435734573
  related item:
    title info:
      title: Micro & nano technologies
  identifier: 9780080964546
  identifier: 0080964540
  identifier: http://proxy.library.tamu.edu/login
  record info:
    record content source: OPELS
    record creation date: 140529
    record change date: 20260326200922.1
    record identifier: in00005754507
    language of cataloging:
      language term: eng