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New approaches to image processing based failure analysis of nano-scale ULSI devices /

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New Approaches to Image Processing Based Failure Analysis of Nano-Scale ULSI Devices introduces the reader to transmission and scanning microscope image processing for metal and non-metallic microstructures. Engineers and scientists face the pressing problem in ULSI development and quality assurance...

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Bibliographic Details
Main Author: Zalevsky, Zeev
Corporate Author: ScienceDirect (Online service)
Other Authors: Livshits, Pavel, Gur, Eran
Format: eBook
Language:English
Language Notes:English.
Published: Oxford : William Andrew, 2014.
Series:Micro & nano technologies.
Subjects:
Integrated circuits > Ultra large scale integration > Testing.
Nanoelectronics.
Microelectronics.
Miniaturization
Nanoélectronique.
Microélectronique.
microelectronics.
TECHNOLOGY & ENGINEERING > Mechanical.
Integrated circuits > Ultra large scale integration > Testing
Microelectronics
Nanoelectronics
Electronic books.
Online Access:Connect to the full text of this electronic book
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