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New approaches to image processing based failure analysis of nano-scale ULSI devices /

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New Approaches to Image Processing Based Failure Analysis of Nano-Scale ULSI Devices introduces the reader to transmission and scanning microscope image processing for metal and non-metallic microstructures. Engineers and scientists face the pressing problem in ULSI development and quality assurance...

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Bibliographic Details
Main Author: Zalevsky, Zeev
Corporate Author: ScienceDirect (Online service)
Other Authors: Livshits, Pavel, Gur, Eran
Format: eBook
Language:English
Language Notes:English.
Published: Oxford : William Andrew, 2014.
Series:Micro & nano technologies.
Subjects:
Integrated circuits > Ultra large scale integration > Testing.
Nanoelectronics.
Microelectronics.
Miniaturization
Nanoélectronique.
Microélectronique.
microelectronics.
TECHNOLOGY & ENGINEERING > Mechanical.
Integrated circuits > Ultra large scale integration > Testing
Microelectronics
Nanoelectronics
Electronic books.
Online Access:Connect to the full text of this electronic book
Description
Summary:New Approaches to Image Processing Based Failure Analysis of Nano-Scale ULSI Devices introduces the reader to transmission and scanning microscope image processing for metal and non-metallic microstructures. Engineers and scientists face the pressing problem in ULSI development and quality assurance: microscopy methods can't keep pace with the continuous shrinking of feature size in microelectronics. Nanometer scale sizes are below the resolution of light, and imaging these features is nearly impossible even with electron microscopes, due to image noise.
Physical Description:1 online resource (179 pages)
Bibliography:Includes bibliographical references.
ISBN:9780323241434
0323241433
9780128000175
0128000171