Symposium D on Diagnostic Techniques for Semiconductor Materials Analysis and Fabrication Process Control Strasbourg, France, ScienceDirect (Online service), European Materials Research Society, Crean, G. M., Stuck, R., & Woollam, J. A. (1993). Semiconductor materials analysis and fabrication process control: Proceedings of Symposium D on Diagnostic Techniques for Semiconductor Materials Analysis and Fabrication Process Control of the 1992 E-MRS Spring Conference, Strasbourg, France, June 2-5, 1992. North-Holland.
Chicago Style (17th ed.) CitationSymposium D on Diagnostic Techniques for Semiconductor Materials Analysis and Fabrication Process Control Strasbourg, France, ScienceDirect (Online service), European Materials Research Society, G. M. Crean, R. Stuck, and John A. Woollam. Semiconductor Materials Analysis and Fabrication Process Control: Proceedings of Symposium D on Diagnostic Techniques for Semiconductor Materials Analysis and Fabrication Process Control of the 1992 E-MRS Spring Conference, Strasbourg, France, June 2-5, 1992. Amsterdam: North-Holland, 1993.
MLA (9th ed.) CitationSymposium D on Diagnostic Techniques for Semiconductor Materials Analysis and Fabrication Process Control Strasbourg, France, et al. Semiconductor Materials Analysis and Fabrication Process Control: Proceedings of Symposium D on Diagnostic Techniques for Semiconductor Materials Analysis and Fabrication Process Control of the 1992 E-MRS Spring Conference, Strasbourg, France, June 2-5, 1992. North-Holland, 1993.