Cover Image

Ion implantation : science and technology /

Show other versions (2)

Ion Implantation Science and Technology 2e.

Bibliographic Details
Corporate Author: ScienceDirect (Online service)
Other Authors: Ziegler, J. F. (James F.)
Format: eBook
Language:English
Language Notes:English.
Published: Boston : Academic Press, ©1988.
Edition:2nd ed.
Subjects:
Ion implantation.
Ions > Implantation.
SCIENCE > Physics > Atomic & Molecular.
Ion implantation
Aufsatzsammlung
Ionenimplantation
Electronic books.
Online Access:Connect to the full text of this electronic book
Description
Summary:Ion Implantation Science and Technology 2e.
Physical Description:1 online resource (ix, 498 pages) : illustrations
Bibliography:Includes bibliographical references and index.
ISBN:9780323161657
0323161650