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C, H, N and O in Si and Characterization and Simulation of Materials and Processes : Proceedings of Symposium N and Symposium G of the 1995 E-Mrs Spring Conference, Held in Strasbourg, France, 22-26 May 1995 /

Containing over 200 papers, this volume contains the proceedings of two symposia in the E-MRS series. Part I presents a state of the art review of the topic - Carbon, Hydrogen, Nitrogen and Oxygen in Silicon and in Other Elemental Semiconductors. There was strong representation from the industrial l...

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Bibliographic Details
Corporate Authors: Symposium N on Carbon, Hydrogen, Nitrogen, and Oxygen in Silicon and Other Elemental Semiconductors Strasbourg, France, ScienceDirect (Online service), Symposium G on Atomic Scale Characterization and Simulation of Materials and Processes
Other Authors: Borghesi, A.
Format: Conference Proceeding eBook
Language:English
Published: Oxford : Elsevier Science, 1996.
Series:European Materials Research Society symposia proceedings.
Subjects:
Semiconductors > Congresses.
Silicon > Congresses.
Semiconductors > Defects > Congresses.
Semi-conducteurs > Congrès.
Silicium > Congrès.
Semi-conducteurs > Défauts > Congrès.
TECHNOLOGY & ENGINEERING > Electronics > Semiconductors.
TECHNOLOGY & ENGINEERING > Electronics > Solid State.
Semiconductors
Semiconductors > Defects
Silicon
Electronic books.
Congress
proceedings (reports)
Conference papers and proceedings
Conference papers and proceedings.
Actes de congrès.
Online Access:Connect to the full text of this electronic book
Description
Summary:Containing over 200 papers, this volume contains the proceedings of two symposia in the E-MRS series. Part I presents a state of the art review of the topic - Carbon, Hydrogen, Nitrogen and Oxygen in Silicon and in Other Elemental Semiconductors. There was strong representation from the industrial laboratories, illustrating that the topic is highly relevant for the semiconductor industry. The second part of the volume deals with a topic which is undergoing a process of convergence with two concerns that are more particularly application oriented. Firstly, the advanced instrumentation which.
Item Description:2. Experimental procedure.
Physical Description:1 online resource (580 pages)
ISBN:9780444596338
044459633X