Handbook of thin film deposition /

The Handbook of Thin Film Deposition is a comprehensive reference focusing on thin film technologies and applications used in the semiconductor industry and the closely related areas of thin film deposition, thin film micro properties, photovoltaic solar energy applications, new materials for memory...

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Bibliographic Details
Main Author: Seshan, Krishna
Corporate Author: ScienceDirect (Online service)
Format: eBook
Language:English
Published: [Place of publication not identified] : William Andrew, 2012.
Edition:[3rd ed.].
Subjects:
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