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Industrial micro & nano fabrication /

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This book focuses on the industrial perspective for micro- and nanofabrication methods including large-scale manufacturing, transfer of concepts from lab to factory, process tolerance, yield, robustness, and cost. It gives a history of miniaturization, micro- and nanofabrication, and surveys industr...

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Bibliographic Details
Main Author: Luttge, Regina
Corporate Author: ScienceDirect (Online service)
Format: eBook
Language:English
Published: Norwich, N.Y. : Oxford : William Andrew ; Elsevier Science [distributor], 2010.
Series:Micro and nano technologies series
Subjects:
Microfabrication.
Nanotechnology.
Nanotechnologie.
Microfabrication
Nanotechnology
Electronic books.
Online Access:Connect to the full text of this electronic book
Table of Contents:
  • Microsystems technology; Nanotechnology; Microsystems for Information Technology; Micro and nanomechanical sensors and actuators; Sensors for chemical and medical applications; Microfluidic systems; Micro and nanotechnology for sustainable energy.