Microelectronics and microscopy /

Bibliographic Details
Corporate Author:	ScienceDirect (Online service)
Other Authors:	Hawkes, P. W.
Format:	eBook
Language:	English
Published:	Boston : Academic Press, ©1992.
Series:	Advances in electronics and electron physics ; 83.
Subjects:	Microelectronics. Lithography, Electron beam. Scanning electron microscopy. Imaging systems. Miniaturization Microscopy, Electron, Scanning Microélectronique. Lithographie par faisceau d'électrons. Microscopie électronique à balayage. Imagerie (Technique) microelectronics. Imaging systems Lithography, Electron beam Microelectronics Scanning electron microscopy Electronic books.
Online Access:	Connect to the full text of this electronic book

Description
Physical Description:	1 online resource (xi, 282 pages : illustrations). Online version of the print title.
Format:	System requirements: Internet connectivity, World Wide Web browser, and Adobe Acrobat reader. Mode of access: World Wide Web.
Bibliography:	Includes bibliographical references and index.
ISBN:	0120147254 9780120147250
ISSN:	0065-2539 ;