Ion implantation : science and technology /
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| Format: | eBook |
| Language: | English |
| Published: |
Orlando :
Academic Press,
1984.
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| Online Access: | Connect to the full text of this electronic book |
| Physical Description: | 1 online resource (xi, 635 pages) : illustrations |
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| Format: | Master and use copy. Digital master created according to Benchmark for Faithful Digital Reproductions of Monographs and Serials, Version 1. Digital Library Federation, December 2002. |
| Bibliography: | Includes bibliographical references and index. |