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Handbook of chemical vapor deposition (CVD) : principles, technology, and applications /

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Bibliographic Details
Main Author: Pierson, Hugh O.
Corporate Author: ScienceDirect (Online service)
Format: eBook
Language:English
Published: Park Ridge, N.J., U.S.A. : Noyes Publications, ©1992.
Subjects:
Vapor-plating > Handbooks, manuals, etc.
TECHNOLOGY & ENGINEERING > Technical & Manufacturing Industries & Trades.
Vapor-plating
CVD-Verfahren
Dépôt chimique en phase vapeur > Manuels d'enseignement.
Dépôt en phase vapeur > traitement surface.
Electronic books.
Handbook
handbooks.
Handbooks and manuals
Handbooks and manuals.
Guides et manuels.
Online Access:Connect to the full text of this electronic book
Description
Physical Description:1 online resource (xxii, 436 pages) : illustrations
Format:Master and use copy. Digital master created according to Benchmark for Faithful Digital Reproductions of Monographs and Serials, Version 1. Digital Library Federation, December 2002.
Bibliography:Includes bibliographical references and index.
ISBN:9781437744880
1437744885