rdf-syntax-grammar
mods:
  schema location: http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
  title info:
    title: Oxygen in silicon
  name:
    name part: Shimura, Fumio.
  name:
    name part: ScienceDirect (Online service)
  type of resource: text
  genre: bibliography
  genre: Electronic books.
  origin info:
    place:
      place term: nyu
    place:
      place term: Boston
    publisher: Academic Press, Inc.
    date issued: ©1994
    date issued: 1994
    issuance: monographic
  language:
    language term: eng
  physical description:
    reformatting quality: access
    form: remote
    extent: 1 online resource (xvi, 679 pages) : illustrations
  abstract: This volume reviews the latest understanding of the behavior and roles of oxygen in silicon, which will carry the field into the ULSI era from the experimental and theoretical points of view. The fourteen chapters, written by recognized authorities representing industrial and academic institutions, cover thoroughly the oxygen related phenomena from the crystal growth to device fabrication processes, as well as indispensable diagnostic techniques for oxygen. Key Features* Comprehensive study of the behavior of oxygen in silicon* Discusses silicon crystals f.
  table of contents: Front Cover; Oxygen in Silicon: Semiconductors and Semimetals; Copyright Page; Contents; List of Contributors; Preface; Chapter 1. Introduction to Oxygen in Silicon; Chapter 2. The Incorporation of Oxygen into Silicon Crystals; Chapter 3. Characterization Techniques for Oxygen in Silicon; Chapter 4. Oxygen Concentration Measurement; Chapter 5. Intrinsic Point Defects in Silicon; Chapter 6. Some Atomic Configurations of Oxygen; Chapter 7. Electrical Properties of Oxygen in Silicon; Chapter 8. Diffusion of Oxygen in Silicon.
  note: volume editor, Fumio Shimura.
  note: Master and use copy. Digital master created according to Benchmark for Faithful Digital Reproductions of Monographs and Serials, Version 1. Digital Library Federation, December 2002. http://purl.oclc.org/DLF/benchrepro0212 MiAaHDL
  note: digitized 2010 HathiTrust Digital Library committed to preserve pda MiAaHDL
  note: Includes bibliographical references and index.
  subject:
    topic: Semiconductors
  subject:
    topic: Oxygen
  subject:
    topic: Silicon
  subject:
    topic: Semi-conducteurs
  subject:
    topic: Oxygène
  subject:
    topic: Silicium
  subject:
    topic: semiconductor
  subject:
    topic: oxygen
  subject:
    topic: silicon
  subject:
    topic: SCIENCE
    topic: Physics
    topic: Electricity
  subject:
    topic: Oxygen
  subject:
    topic: Semiconductors
  subject:
    topic: Silicon
  subject:
    topic: Oxygène
  subject:
    topic: Silicone
  subject:
    topic: Semiconducteurs
  subject:
    topic: Semimetals
  classification: TK7872.S4 W5 v.42
  classification: 537.6/22
  related item:
    title info:
      title: Oxygen in silicon
    origin info:
      publisher: Boston : Academic Press, Inc., ©1994
    identifier: (OCoLC)30882990
  related item:
    identifier: (OCoLC)30882990
  related item:
    title info:
      title: Semiconductors and semimetals ; v. 42
  identifier: 9780080864396
  identifier: 0080864392
  identifier: 1281514233
  identifier: 9781281514233
  identifier: 0127521429
  identifier: 9780127521428
  identifier: http://proxy.library.tamu.edu/login
  record info:
    record content source: OCLCE
    record creation date: 100520
    record change date: 20260326175134.0
    record identifier: in00005743116
    language of cataloging:
      language term: eng