Handbook of physical vapor deposition (PVD) processing /

This updated version of the popular handbook further explains all aspects of physical vapor deposition (PVD) process technology from the characterizing and preparing the substrate material, through deposition processing and film characterization, to post-deposition processing. The emphasis of the ne...

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Bibliographic Details
Main Author: Mattox, D. M.
Corporate Author: ScienceDirect (Online service)
Format: eBook
Language:English
Published: Norwich, N.Y. : Oxford : William Andrew ; Elsevier Science [distributor], ©2010.
Edition:2nd ed.
Subjects:
Online Access:Connect to the full text of this electronic book
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by Mattox, D. M.
Published 2010
Book