rdf-syntax-grammar
mods:
  schema location: http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
  title info:
    title: Epitaxial silicon technology
  name:
    name part: Baliga, B. Jayant
    name part: 1948-
  name:
    name part: ScienceDirect (Online service)
  type of resource: text
  genre: bibliography
  genre: Electronic books.
  origin info:
    place:
      place term: flu
    place:
      place term: Orlando
    publisher: Academic Press
    date issued: 1986
    issuance: monographic
  language:
    language term: eng
  physical description:
    reformatting quality: access
    form: remote
    extent: 1 online resource (viii, 328 pages) : illustrations
  table of contents: Silicon vapor phase epitaxy / H.M. Liaw and J.W. Rose -- Silicon molecular beam epitaxy / Subramanian S. Iyer -- Silicon liquid phase epitaxy / B. Jayant Baliga -- Silicon on sapphire heteroepitaxy / Prahalad K. Vasudev -- Silicon-on-insulator epitaxy / Hon Wai Lam.
  note: edited by B. Jayant Baliga.
  note: Master and use copy. Digital master created according to Benchmark for Faithful Digital Reproductions of Monographs and Serials, Version 1. Digital Library Federation, December 2002. http://purl.oclc.org/DLF/benchrepro0212 MiAaHDL
  note: digitized 2010 HathiTrust Digital Library committed to preserve pda MiAaHDL
  note: Includes bibliographical references and index.
  subject:
    topic: Semiconductors
    topic: Design and construction
  subject:
    topic: Silicon crystals
    topic: Growth
  subject:
    topic: Epitaxy
  subject:
    topic: Silicon-on-insulator technology
  subject:
    topic: Silicium cristallisé
    topic: Croissance
  subject:
    topic: Épitaxie
  subject:
    topic: Silicium sur isolant
  subject:
    topic: Epitaxy
  subject:
    topic: Semiconductors
    topic: Design and construction
  subject:
    topic: Silicon crystals
    topic: Growth
  subject:
    topic: Silicon-on-insulator technology
  subject:
    topic: Epitaxie
  subject:
    topic: Silicium
  subject:
    topic: Silicon crystals
    topic: Growth
  subject:
    topic: Epitaxy
  classification: TK7871.85 .E65 1986
  classification: 621.3815/2
  classification: UQ 2200
  classification: ELT 282f
  classification: ELT 280f
  related item:
    title info:
      title: Epitaxial silicon technology
    origin info:
      publisher: Orlando : Academic Press, 1986
    identifier: (DLC) 86003524
    identifier: (OCoLC)13426011
  related item:
    identifier: (DLC) 86003524
    identifier: (OCoLC)13426011
  identifier: 9780120771202
  identifier: 0120771209
  identifier: http://proxy.library.tamu.edu/login
  record info:
    record content source: OCLCE
    record creation date: 100411
    record change date: 20260326173933.9
    record identifier: in00005741964
    language of cataloging:
      language term: eng