rdf-syntax-grammar
mods:
  schema location: http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
  title info:
    title: Ion implantation in semiconductors, silicon and germanium
  name:
    name part: Mayer, James W.
    name part: 1930-
    role:
      role term: creator
  name:
    name part: Eriksson, Lennart
    name part: 1938-
    role:
      role term: author.
  name:
    name part: Davies, John Arthur
    name part: 1927-
    role:
      role term: author.
  name:
    name part: ScienceDirect (Online service)
  type of resource: text
  genre: bibliography
  genre: Electronic books.
  origin info:
    place:
      place term: nyu
    place:
      place term: New York
    publisher: Academic Press
    date issued: 1970
    issuance: monographic
  language:
    language term: eng
  physical description:
    reformatting quality: access
    form: remote
    extent: 1 online resource (xiii, 280 pages) illustrations
  note: [by] James W. Mayer, Lennart Eriksson and John A. Davies.
  note: Master and use copy. Digital master created according to Benchmark for Faithful Digital Reproductions of Monographs and Serials, Version 1. Digital Library Federation, December 2002. http://purl.oclc.org/DLF/benchrepro0212 MiAaHDL
  note: digitized 2010 HathiTrust Digital Library committed to preserve pda MiAaHDL
  note: Includes bibliographical references.
  subject:
    topic: Ion implantation
  subject:
    topic: Semiconductors
  subject:
    topic: Ion bombardment
  subject:
    topic: Semiconductors
  subject:
    topic: Semi-conducteurs
  subject:
    topic: Bombardement ionique
  subject:
    topic: Ions
    topic: Implantation
  subject:
    topic: semiconductor
  subject:
    topic: 33.72 electronic transport in condensed matter
  subject:
    topic: TECHNOLOGY & ENGINEERING
    topic: Electronics
    topic: Semiconductors
  subject:
    topic: TECHNOLOGY & ENGINEERING
    topic: Electronics
    topic: Solid State
  subject:
    topic: Ion bombardment
  subject:
    topic: Ion implantation
  subject:
    topic: Semiconductors
  subject:
    topic: Halbleiter
  subject:
    topic: Ionenimplantation
  subject:
    topic: Halfgeleiders
  subject:
    topic: Ionenimplantatie
  subject:
    topic: Silicium
  subject:
    topic: Germanium
  subject:
    topic: Ion implantation
  subject:
    topic: Ion implantation
  classification: TK7871.85 .M38
  classification: 621.381/52
  classification: 33.72
  classification: 33.79
  classification: UP 3000
  classification: cci1icc
  classification: coll1
  related item:
    title info:
      title: Ion implantation in semiconductors, silicon and germanium
    name:
      name part: Mayer, James W., 1930-
    origin info:
      publisher: New York, Academic Press, 1970
    identifier: (DLC) 75107563
    identifier: (OCoLC)92308
  identifier: 9780124808508
  identifier: 0124808506
  identifier: 9780323157216
  identifier: 0323157211
  identifier: 75107563
  identifier: http://proxy.library.tamu.edu/login
  record info:
    record content source: OCLCE
    record creation date: 100406
    record change date: 20260326173730.0
    record identifier: in00005741743
    language of cataloging:
      language term: eng