Laser microfabrication : thin film processes and lithography /

This book reviews the solid core of fundamental scientific knowledge on laser-stimulated surface chemistry that has accumulated over the past few years. It provides a useful overview for the student and interested non-expert as well as essential reference data (photodissociation cross sections, ther...

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Bibliographic Details
Corporate Author:	ScienceDirect (Online service)
Other Authors:	Ehrlich, Daniel J., Tsao, Jeffrey Y.
Format:	eBook
Language:	English
Published:	Boston : Academic Press, ©1989.
Subjects:	Lasers > Industrial applications. Thin film devices > Design and construction. Microlithography. Microfabrication. Lasers > Applications industrielles. Microlithographie. TECHNOLOGY & ENGINEERING > Lasers & Photonics. Lasers > Industrial applications Microfabrication Microlithography Thin film devices > Design and construction Dünnschichttechnik Laserbearbeitung Oberflächenbehandlung Laser Photolithographie (Halbleitertechnologie) Electronic books.
Online Access:	Connect to the full text of this electronic book

Table of Contents:

Sources, optics, and laser microfabrications systems for direct writing and projection lithography / Y.S. Liu
Laser-stimulated molecular processes on surfaces / T.J. Chuang
Spectroscopy and photochemistry of gases, adsorbates, and liquids / M. Rothschild
Photophysics and thermophysics of light absorption and energy transport in solids / C.I.H. Ashby and J.Y. Tsao
Transport and kinetics / H.J. Zeigler, D.J. Ehrlich, and J.Y. Tsao
Laser etching / John J. Ritsko
Laser deposition : energetics and chemical kinetics / R.L. Jackson [and others]
Laser deposition : experimental approaches / J. Haigh and M.R. Aylett
Epitaxy / S.J.C. Irvine
Doping and oxidation / Ian W. Boyd.