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Laser microfabrication : thin film processes and lithography /

This book reviews the solid core of fundamental scientific knowledge on laser-stimulated surface chemistry that has accumulated over the past few years. It provides a useful overview for the student and interested non-expert as well as essential reference data (photodissociation cross sections, ther...

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Bibliographic Details
Corporate Author: ScienceDirect (Online service)
Other Authors: Ehrlich, Daniel J., Tsao, Jeffrey Y.
Format: eBook
Language:English
Published: Boston : Academic Press, ©1989.
Subjects:
Lasers > Industrial applications.
Thin film devices > Design and construction.
Microlithography.
Microfabrication.
Lasers > Applications industrielles.
Microlithographie.
TECHNOLOGY & ENGINEERING > Lasers & Photonics.
Lasers > Industrial applications
Microfabrication
Microlithography
Thin film devices > Design and construction
Dünnschichttechnik
Laserbearbeitung
Oberflächenbehandlung
Laser
Photolithographie (Halbleitertechnologie)
Electronic books.
Online Access:Connect to the full text of this electronic book
Description
Summary:This book reviews the solid core of fundamental scientific knowledge on laser-stimulated surface chemistry that has accumulated over the past few years. It provides a useful overview for the student and interested non-expert as well as essential reference data (photodissociation cross sections, thermochemical constants, etc.) for the active researcher.
Physical Description:1 online resource (xii, 587 pages) : illustrations
Format:Master and use copy. Digital master created according to Benchmark for Faithful Digital Reproductions of Monographs and Serials, Version 1. Digital Library Federation, December 2002.
Bibliography:Includes bibliographical references and index.
ISBN:9780080918020
0080918026