APA (7th ed.) Citation

ScienceDirect (Online service), Ehrlich, D. J., & Tsao, J. Y. (1989). Laser microfabrication: Thin film processes and lithography. Academic Press.

Chicago Style (17th ed.) Citation

ScienceDirect (Online service), Daniel J. Ehrlich, and Jeffrey Y. Tsao. Laser Microfabrication: Thin Film Processes and Lithography. Boston: Academic Press, 1989.

MLA (9th ed.) Citation

ScienceDirect (Online service), et al. Laser Microfabrication: Thin Film Processes and Lithography. Academic Press, 1989.

Warning: These citations may not always be 100% accurate.