Plasma diagnostics /
| Corporate Author: | |
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| Other Authors: | , |
| Format: | eBook |
| Language: | English |
| Published: |
Boston :
Academic Press,
©1989.
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| Series: | Plasma--materials interactions.
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| Subjects: | |
| Online Access: | Connect to the full text of this electronic book |
Table of Contents:
- v. 1. Discharge parameters and chemistry
- v. 2. Surface analysis and interactions.