rdf-syntax-grammar
mods:
  schema location: http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
  title info:
    title: Analytical techniques for thin films
  name:
    name part: Tu, K. N. (King-Ning)
    name part: 1937-
  name:
    name part: Rosenberg, R.
  name:
    name part: ScienceDirect (Online service)
  type of resource: text
  genre: bibliography
  genre: Electronic books.
  origin info:
    place:
      place term: mau
    place:
      place term: Boston
    publisher: Academic Press
    date issued: ©1988
    date issued: 1988
    issuance: monographic
  language:
    language term: eng
  physical description:
    reformatting quality: access
    form: remote
    extent: 1 online resource (xi, 493 pages) : illustrations
  table of contents: Submicron structure and microanalysis / K.N. Tu and R. Rosenberg -- Synchrotron radiation photoemission studies of interfaces / J.H. Weaver -- Contact x-ray microscopy / R. Feder and D.M. Shinozaki -- X-ray diffraction analysis of stress and strain in thin films / A. Segmuller and M. Murakami --X-ray diffraction analysis of diffusion in thin films / M. Murakami, A. Segmuller, and K.N. Tu -- ESCA / N. Martensson -- Cross-sectional transmission electron microscopy of electronic and photonic devices / T.T. Sheng -- High resolution transmission electron microscopy of surfaces and interfaces / D. Cherns -- Scanning transmission electron microscopy / P. Batson -- Rutherford backscattering spectrometry on thin solid films / T.G. Finstad and W.K. Chu -- Atomic structure and atomic layer compositional analysis of thin solid films using time-of-flight atom-probe field ion microscopy / T.T. Tsong.
  note: edited by K.N. Tu and R. Rosenberg.
  note: Master and use copy. Digital master created according to Benchmark for Faithful Digital Reproductions of Monographs and Serials, Version 1. Digital Library Federation, December 2002. http://purl.oclc.org/DLF/benchrepro0212 MiAaHDL
  note: digitized 2010 HathiTrust Digital Library committed to preserve pda MiAaHDL
  note: Includes bibliographical references and index.
  subject:
    topic: Thin films
    topic: Technique
  subject:
    topic: Couches minces
    topic: Technique
  subject:
    topic: Thin films
    topic: Technique
  subject:
    topic: Couches minces
  subject:
    topic: Bombardement ionique
    topic: Applications scientifiques
  subject:
    topic: Faisceaux électroniques
    topic: Applications scientifiques
  subject:
    topic: Rayons X
    topic: Applications scientifiques
  classification: TA403 .T74 vol. 27
  classification: QC176.83
  classification: 620.1/1 s 530.4/1
  related item:
    title info:
      title: Analytical techniques for thin films
    origin info:
      publisher: Boston : Academic Press, ©1988
    identifier: (DLC) 87018857
    identifier: (OCoLC)16129139
  related item:
    identifier: (DLC) 87018857
    identifier: (OCoLC)16129139
  related item:
    title info:
      title: Treatise on materials science and technology ; v. 27
  identifier: 9780123418272
  identifier: 0123418275
  identifier: 87018857
  identifier: http://proxy.library.tamu.edu/login
  record info:
    record content source: OCLCE
    record creation date: 100325
    record change date: 20260326172925.6
    record identifier: in00005740886
    language of cataloging:
      language term: eng