Silicides for VLSI applications /

Most of the subject matter of this book has previously been available only in the form of research papers and review articles. I have not attempted to refer to all the published papers. The reader may find it advantageous to refer to the references listed.

Bibliographic Details
Main Author:	Murarka, S. P.
Corporate Author:	ScienceDirect (Online service)
Format:	eBook
Language:	English
Published:	New York : Academic Press, 1983.
Subjects:	Silicides. Electronics > Materials. Integrated circuits > Very large scale integration. Siliciures. Électronique > Matériaux. Circuits intégrés à très grande échelle. Electronics > Materials Integrated circuits > Very large scale integration Silicides Electronic books.
Online Access:	Connect to the full text of this electronic book

Description
Summary:	Most of the subject matter of this book has previously been available only in the form of research papers and review articles. I have not attempted to refer to all the published papers. The reader may find it advantageous to refer to the references listed.
Item Description:	Includes indexes.
Physical Description:	1 online resource (xi, 200 pages) : illustrations
Format:	Master and use copy. Digital master created according to Benchmark for Faithful Digital Reproductions of Monographs and Serials, Version 1. Digital Library Federation, December 2002.
Bibliography:	Includes bibliographical references (pages 177-186).