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Handbook of chemical vapor depostion [i.e. deposition] (CVD) : principles, technology, and applications /

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Turn to this new second edition for an understanding of the latest advances in the chemical vapor deposition (CVD) process. CVD technology has recently grown at a rapid rate, and the number and scope of its applications and their impact on the market have increased considerably. The market is now es...

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Bibliographic Details
Main Author: Pierson, Hugh O.
Corporate Author: ScienceDirect (Online service)
Format: eBook
Language:English
Published: Norwich, N.Y. : Noyes Publications/William Andrew Pub., ©1999.
Edition:2nd ed.
Series:Materials science and process technology series.
Subjects:
Chemical vapor deposition > Handbooks, manuals, etc.
Vapor-plating > Handbooks, manuals, etc.
Dépôt chimique en phase vapeur > Guides, manuels, etc.
Dépôt en phase vapeur > Guides, manuels, etc.
Chemical vapor deposition
Vapor-plating
Electronic books.
handbooks.
manuals (instructional materials)
Handbooks and manuals
Handbooks and manuals.
Guides et manuels.
Online Access:Connect to the full text of this electronic book
Table of Contents:
  • Introduction and General Considerations
  • Fundamentals of Chemical Vapor Deposition
  • The Chemistry of CVD
  • Metallo-Organic CVD (MOCVD)
  • CVD Processes and Equipment
  • The CVD of Metals
  • The CVD of the Allotropes of Carbon
  • The CVD of Non-Metallic Elements
  • The CVD of Ceramic Materials: Carbides
  • The CVD of Ceramic Materials: Nitrides
  • The CVD of Ceramic Materials: Oxides
  • The CVD of Ceramic Materials: Borides, Silicides, III-V Compounds and II-VI Compounds (Chalcogenides)
  • CVD in Electronic Applications: Semiconductors
  • CVD in Electronic Applications: Conductors, Insulators, and Diffusion Barriers
  • CVD in Optoelectronic and Ferroelectric Applications
  • CVD in Optical Applications
  • CVD in Wear- and Corrosion-Resistant Applications
  • CVD in Cutting-Tool Applications
  • CVD in Fiber, Powder, and Monolithic Applications
  • Conversion Guide
  • Appendix: Alternative Processes for Thin-Film Deposition and Surface Modification
  • Index.