Plasma deposition of amorphous silicon-based materials /

Semiconductors made from amorphous silicon have recently become important for their commercial applications in optical and electronic devices including FAX machines, solar cells, and liquid crystal displays. Plasma Deposition of Amorphous Silicon-Based Materials is a timely, comprehensive reference...

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Bibliographic Details
Corporate Author: ScienceDirect (Online service)
Other Authors: Bruno, Giovanni, Capezzuto, Pio, Madan, A. (Arun)
Format: eBook
Language:English
Published: Boston : Academic Press, ©1995.
Series:Plasma--materials interactions.
Subjects:
Online Access:Connect to the full text of this electronic book
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Published 1995
Book