Plasma deposition of amorphous silicon-based materials /
Semiconductors made from amorphous silicon have recently become important for their commercial applications in optical and electronic devices including FAX machines, solar cells, and liquid crystal displays. Plasma Deposition of Amorphous Silicon-Based Materials is a timely, comprehensive reference...
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| Other Authors: | , , |
| Format: | eBook |
| Language: | English |
| Published: |
Boston :
Academic Press,
©1995.
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| Series: | Plasma--materials interactions.
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| Subjects: | |
| Online Access: | Connect to the full text of this electronic book |
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