Plasma deposition of amorphous silicon-based materials /
Semiconductors made from amorphous silicon have recently become important for their commercial applications in optical and electronic devices including FAX machines, solar cells, and liquid crystal displays. Plasma Deposition of Amorphous Silicon-Based Materials is a timely, comprehensive reference...
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| Other Authors: | , , |
| Format: | eBook |
| Language: | English |
| Published: |
Boston :
Academic Press,
©1995.
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| Series: | Plasma--materials interactions.
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| Subjects: | |
| Online Access: | Connect to the full text of this electronic book |
| Summary: | Semiconductors made from amorphous silicon have recently become important for their commercial applications in optical and electronic devices including FAX machines, solar cells, and liquid crystal displays. Plasma Deposition of Amorphous Silicon-Based Materials is a timely, comprehensive reference book written by leading authorities in the field. This volume links the fundamental growth kinetics involving complex plasma chemistry with the resulting semiconductor film properties and the subsequent effect on the performance of the electronic devices produced. |
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| Physical Description: | 1 online resource (xi, 324 pages) : illustrations |
| Bibliography: | Includes bibliographical references and index. |
| ISBN: | 9780080539102 0080539106 1281054100 9781281054104 |