rdf-syntax-grammar
mods:
  schema location: http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
  title info:
    title: Advances in plasma-grown hydrogenated films
  name:
    name part: Francombe, Maurice H.
  name:
    name part: ScienceDirect (Online service)
  type of resource: text
  genre: bibliography
  genre: Electronic books.
  origin info:
    place:
      place term: cau
    place:
      place term: San Diego
    publisher: Academic Press
    date issued: ©2002
    date issued: 2002
    issuance: monographic
  language:
    language term: eng
  physical description:
    form: remote
    extent: 1 online resource (x, 280 pages) : illustrations
  abstract: Physics of Thin Films is one of the longest running continuing series in thin film science, consisting of 25 volumes since 1963. The series contains quality studies of the properties of various thin films materials and systems. In order to be able to reflect the development of today's science and to cover all modern aspects of thin films, the series, starting with Volume 20, has moved beyond the basic physics of thin films. It now addresses the most important aspects of both inorganic and organic thin films, in both their theoretical and their technological aspects. Starting with Volume 30, the title of the series, Thin Films, is being changed to Thin Films and Nanostructures. We feel that this new title reflects more accurately the rapidly growing inclusion of research and development efforts on nanostructures, especially in relation to novel solid-state device formats.
  note: edited by Maurice H. Francombe.
  note: Includes bibliographical references and index.
  subject:
    topic: Semiconductors
    topic: Plasma effects
  subject:
    topic: Semiconductor films
  subject:
    topic: Amorphous semiconductors
  subject:
    topic: Semi-conducteurs
    topic: Effets des plasmas sur
  subject:
    topic: Couches à semi-conducteurs
  subject:
    topic: Semi-conducteurs amorphes
  subject:
    topic: TECHNOLOGY & ENGINEERING
    topic: Electronics
    topic: Solid State
  subject:
    topic: TECHNOLOGY & ENGINEERING
    topic: Electronics
    topic: Semiconductors
  subject:
    topic: Amorphous semiconductors
  subject:
    topic: Semiconductor films
  subject:
    topic: Semiconductors
    topic: Plasma effects
  classification: QC176.A1 P5 v.30eb
  classification: 547.23
  classification: 621.38152
  related item:
    title info:
      title: Advances in plasma-grown hydrogenated films
    origin info:
      publisher: San Diego : Academic Press, ©2002
    identifier: (OCoLC)48770876
  related item:
    title info:
      title: Thin films and nanostructures ; v. 30
  identifier: 9780125330305
  identifier: 0125330308
  identifier: 9780080542874
  identifier: 0080542875
  identifier: 90801:90801 Elsevier Science & Technology
  identifier: http://proxy.library.tamu.edu/login
  record info:
    record content source: OPELS
    record creation date: 070802
    record change date: 20260326145821.4
    record identifier: in00005731016
    language of cataloging:
      language term: eng