APA (7th ed.) Citation

ScienceDirect (Online service) & Rossnagel, S. M. (1996). Modeling of film deposition for microelectronic applications. Academic Press.

Chicago Style (17th ed.) Citation

ScienceDirect (Online service) and Stephen M. Rossnagel. Modeling of Film Deposition for Microelectronic Applications. San Diego: Academic Press, 1996.

MLA (9th ed.) Citation

ScienceDirect (Online service) and Stephen M. Rossnagel. Modeling of Film Deposition for Microelectronic Applications. Academic Press, 1996.