Organometallic vapor-phase epitaxy : theory and practice /
This book describes the operation of a particular technique for the production of compound semiconductor materials. It describes how the technique works, how it can be used for the growth of particular materials and structures, and the application of these materials for specific devices. It contains...
| Main Author: | |
|---|---|
| Corporate Author: | |
| Format: | eBook |
| Language: | English |
| Language Notes: | English. |
| Published: |
San Diego :
Academic Press,
©1999.
|
| Edition: | Second edition. |
| Subjects: | |
| Online Access: | Connect to the full text of this electronic book |
| Summary: | This book describes the operation of a particular technique for the production of compound semiconductor materials. It describes how the technique works, how it can be used for the growth of particular materials and structures, and the application of these materials for specific devices. It contains not only a fundamental description of the operation of the technique but also contains lists of data useful for the everyday operation of OMVPE reactors. It also offers specific recipes that can be used to produce a wide range of specific materials, structures, and devices. Key Features * Updated with new emphasis on the semiconducting nitride materialsGaN and its alloys with In and Al * Emphasizes the newly understood aspects of surface processes * Contains a new chapter, as well as several new sections in chapters on thermodynamics and kinetics. |
|---|---|
| Physical Description: | 1 online resource (xxiv, 572 pages) : illustrations |
| Bibliography: | Includes bibliographical references and index. |
| ISBN: | 9780126738421 0126738424 9780080538181 0080538185 1281057118 9781281057112 9786611057114 6611057110 |